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Semi Conductor Gas Detector

Semi Conductor Gas Detector
Semi Conductor Gas Detector
Product Code : 01
Product Description


  • A single XPS-7 can be used for a variety of semiconductor gases, simply by changing the sensor unit.
  • Cassette-type sensor units eliminate calibration.




Detection Principle

Electrochemical cell

Gas Detected

Semiconductor manufacturing gases

Sampling Method


Detection Range

Depends on the specifications


1/100 of full scale

Indication Accuracy

±10% of full scale

Alarm Mode

2nd stage alarm type

Alarm Indication

Intermittent buzzer, flashing lamp

Response Time

60s or less (60% response)

Operating Temperature

0 to 40°C

Power Source

4 x AA alkaline dry cells (*1) or an AC adaptor

Battery Life*2

Up to 12 hours (by alkaline dry cells at 20℃ without alarms)


W62 x H150 x D128mm (excluding protrusions)


Approx. 1.3kg

Standard Accessories

Gas sampling hose with probe, shoulder strap, 4 x AA alkaline dry
cells, Spare filters

Optional Accessories

AC adaptor (100 VAC/6 VDC), sensor stocker, log data collection kit

  • Under identical measuring conditions.
  • Battery life may vary with ambient conditions, conditions of use, storage period, battery manufactures, etc.

Contact Us

108-109, Chiranjiv Tower, 43, Nehru Place, New Delhi, Delhi, 110019, India
Phone :91-11-46525002/26427233/26447007/26482594/46525001/26482593