- 1
- Piece/Pieces
- INR
Features
- A single XPS-7 can be used for a variety of semiconductor gases, simply by changing the sensor unit.
- Cassette-type sensor units eliminate calibration.
Model | XPS-7 |
Detection Principle | Electrochemical cell |
Gas Detected | Semiconductor manufacturing gases |
Sampling Method | Extractive |
Detection Range | Depends on the specifications |
Resolution | 1/100 of full scale |
Indication Accuracy | 10% of full scale |
Alarm Mode | 2nd stage alarm type |
Alarm Indication | Intermittent buzzer, flashing lamp |
Response Time | 60s or less (60% response) |
Operating Temperature | 0 to 40C |
Power Source | 4 x AA alkaline dry cells (*1) or an AC adaptor |
Battery Life*2 | Up to 12 hours (by alkaline dry cells at 20 without alarms) |
Dimensions | W62 x H150 x D128mm (excluding protrusions) |
Weight | Approx. 1.3kg |
Standard Accessories | Gas sampling hose with probe, shoulder strap, 4 x AA alkaline dry |
Optional Accessories | AC adaptor (100 VAC/6 VDC), sensor stocker, log data collection kit |
- Under identical measuring conditions.
- Battery life may vary with ambient conditions, conditions of use, storage period, battery manufactures, etc.
- Per Day
- Days